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1

Use of amorphous silicon films as sensors

Ryutaro Koike, Setsuo Kodato

Journal:

Sensors and Actuators

Year:

1988

Language:

english

File:

PDF, 899 KB

english, 1988

2

A high-accuracy quick-response optical power sensor with μc-Ge:H thin film

Kodato Setsuo, Naito Yoshinobu, Kuroda Kenji, Kodama Shunichi

Journal:

Sensors and Actuators A: Physical

Year:

1991

Language:

english

File:

PDF, 598 KB

english, 1991

3

Simple high-performance power sensor using μc-Si:Ge thin films

Journal:

Sensors and Actuators

Year:

1989

Language:

english

File:

PDF, 601 KB

english, 1989

4

The Seebeck effect in highly conductive μc-Ge:H films and its application to sensors

Setsuo Kodato, Yoshinobu Naitoh, Kenji Kuroda

Journal:

Sensors and Actuators A: Physical

Year:

1992

Language:

english

File:

PDF, 440 KB

english, 1992

5

Integrated thermopile power sensor using μc-Si thin films

Setsuo Kodato, Itsuo Sugiura

Journal:

Electrical Engineering in Japan

Year:

1990

Language:

english

File:

PDF, 590 KB

english, 1990

6

SiGe alloy film with very high electrical conductivity and thermoelectric power

Journal:

Journal of Non-Crystalline Solids

Year:

1985

Language:

english

File:

PDF, 152 KB

english, 1985

7

SPIE Proceedings [SPIE O-E/LASE'86 Symp (January 1986, Los Angeles) - Los Angeles, CA (Tuesday 21 January 1986)] Amorphous Semiconductors for Microelectronics - μc-Si:H:F Thermopile Power Sensors

Kodato, Setsuo, Adler, David

Year:

1986

Language:

english

File:

PDF, 2.21 MB

english, 1986

8

SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Microlithography and Metrology in Micromachining II - Transient thermal analysis of micromachined silicon bridge

Yuasa, Hiroyasu, Ohya, Seishiro, Karasawa, Shiro, Kodato, Setsuo, Akimoto, Kenji, Postek, Jr., Michael T., Friedrich, Craig R.

Year:

1996

Language:

english

File:

PDF, 403 KB

english, 1996

9

SPIE Proceedings [SPIE Photonics Asia 2004 - Beijing, China (Monday 8 November 2004)] Infrared Components and Their Applications - Fast infrared light source with a construction of silicon microbridge

Zhuang, Qingde, Gong, Haimei, Cai, Yi, Wu, Ruihong, Li, Chunming, Chatard, Jean-Pierre, Setsuo, Kodato, Zhang, Zhan

Year:

2004

Language:

english

File:

PDF, 64 KB

english, 2004

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